Our piezo-electric atomizers are micro-electro-mechanical systems, so-called MEMS devices. Due to their sometimes very small internal dimensions in the range of tens of micrometers and their fluidic layout, they require understanding and practice of Multi-Material-Micro-Manufacturing.Originally our patents related to silicon based spray heads and silicon micro-fabricated nozzle membranes. Today our products are packaged with low cost polymers and metal membranes to largely replace silicon, which remains the material of choice only for nozzle arrays as well as hot embossing and UV printing. Our devices and applications are covered by 17 core patents, new applications are in continuous development.
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